JPS63121439U - - Google Patents
Info
- Publication number
- JPS63121439U JPS63121439U JP1413387U JP1413387U JPS63121439U JP S63121439 U JPS63121439 U JP S63121439U JP 1413387 U JP1413387 U JP 1413387U JP 1413387 U JP1413387 U JP 1413387U JP S63121439 U JPS63121439 U JP S63121439U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- rotating holder
- sample
- ion beam
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1413387U JPH0713214Y2 (ja) | 1987-02-02 | 1987-02-02 | エツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1413387U JPH0713214Y2 (ja) | 1987-02-02 | 1987-02-02 | エツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121439U true JPS63121439U (en]) | 1988-08-05 |
| JPH0713214Y2 JPH0713214Y2 (ja) | 1995-03-29 |
Family
ID=30803839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1413387U Expired - Lifetime JPH0713214Y2 (ja) | 1987-02-02 | 1987-02-02 | エツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713214Y2 (en]) |
-
1987
- 1987-02-02 JP JP1413387U patent/JPH0713214Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0713214Y2 (ja) | 1995-03-29 |